3 research outputs found
Nanoscale Patterning of Organosilane Molecular Thin Films from the Gas Phase and Its Applications: Fabrication of Multifunctional Surfaces and Large Area Molecular Templates for Site-Selective Material Deposition
A simple methodology to fabricate micrometer- and nanometer-scale
patterned surfaces with multiple chemical functionalities is presented.
Patterns with lateral dimensions down to 110 nm were made. The fabrication
process involves multistep gas-phase patterning of amine, thiol, alkyl,
and fluorinated alkyl-functional organosilane molecules using PDMS
molds as shadow masks. Also, a combination process of channel diffused
plasma etching of organosilane molecular thin films in combination
with masked gas-phase deposition to fabricate multilength scale, multifunctional
surfaces is demonstrated